Gregory F. Spencer Department of Physics
Phys 5324 Syllabus for Spring 2006 (pdf)
Vacuum Science & Technology #1: General Vacuum Ideas (pdf)
Vacuum Science & Technology #2: Pressure & Gas Flow (pdf)
Vacuum Science & Technology #3: Mechanical, Roots, & Turbo Pumps (pdf)
Vacuum Science & Technology #4: Diffusion, Cryo, & Ion Pumps (pdf)
Vacuum Science & Technology #5: Vac Systems & Pressure Meas. (pdf)
Vacuum Science & Technology #6: RGA & Leak Detection (pdf)
Film Deposition by Evaporation #1: Thermal Evaporation (pdf)
Film Deposition by Evaporation #2: E-beam Evaporation & Thickness Meas. (pdf)
Film Deposition by Evaporation #3: Step Coverage & Alloys (pdf)
Plasmas & Glow Discharges (pdf)
Plasma Physics & Chemistry (pdf)
Physics of Sputtering (pdf)
Sputter Methods & Systems (pdf)
Characterization, XRD (pdf)
Magnetic Characterization, VSM (pdf)
Cleanroom Safety Rules (pdf)
Test #1 Solution (pdf)
Final Exam Solution (pdf)
